Accurate frequency alignment in fabrication of high-order microring-resonator filters
نویسندگان
چکیده
منابع مشابه
Accurate frequency alignment in fabrication of high-order microring-resonator filters.
Frequency mismatch in high-order microring-resonator filters is investigated. We demonstrate that this frequency mismatch is caused mainly by the intrafield distortion of scanning-electron-beam-lithography (SEBL) used in fabrication. The intrafield distortion of an SEBL system is measured, and a simple method is also proposed to correct this distortion. By applying this correction method, the a...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2008
ISSN: 1094-4087
DOI: 10.1364/oe.16.015958